A continuous vertical reaction furnace for producing carbon nanotubes with pre-set catalysts
A technology of carbon nanotubes and catalysts, which is applied in the field of chemical vapor deposition process equipment manufacturing, can solve the problems of reducing production efficiency, difficult working conditions, and wasting useless time, and achieve the effects of increasing production efficiency, improving working conditions, and reducing productivity
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[0031] The present invention will be further described below in conjunction with accompanying drawing.
[0032]1. The working process is as follows: the heating furnace 15 starts, the temperature of the reaction chamber 12 rises, the inert gas enters from the inlet nozzle 2, and the air in the reaction chamber 13 is evacuated. When the temperature in the reaction chamber 13 reaches 400 degrees, the catalyst feeder 1 is delivered Work, quantitatively feed the catalyst, under the action of gravity, the catalyst settles on the carbon nanotube growth plate 3, at this time, send in hydrogen as the reducing gas through the inlet nozzle 2, and the reducing catalyst changes from an oxidized metal to a nano-sized metal with catalytic activity particles. Continue heating, when the reaction chamber 13 temperature reaches the carbon nanotube formation temperature, enter the carbon source gas from the inlet nozzle 2, close the hydrogen or inert gas, at this time the carbon source gas crack...
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