Wafer batch dispatching method and system under machine group based on real-time dispatching system

Abstract

The invention provides a real time dispatch system-based method and system for wafer batch dispatch under a machine set. The method comprises steps of setting the number of load ports of each machine under a machine set, the real time dispatch rule of each machine, and the preset time specification of each wafer batch dispatched to a corresponding machine according to effective machine information and online wafer batch data; timely obtaining information of a wafer batch which is currently processed by each machine, and calculating an idle sequence of the machines within a follow-up period of estimated time according to the number of the load ports of each machine and the information of the wafer batch which is currently processed by each machine; and sequentially updating the real time dispatch rule of each machine according to the idle sequence, and obtaining a dispatch result of each machine according to the update real time dispatch rule. According to the invention, a phenomenon that machines under the same machine set preorder the same wafer batch during preordering of wafer batches can be prevented.

Description

technical field [0001] The invention relates to the field of semiconductor production, in particular to a wafer batch dispatching method and system under a machine group based on a real-time dispatching system. Background technique [0002] In semiconductor manufacturing and production, due to the complexity of the production process and its processes, the machines used for the process are also different. Different machines or machine groups can process a variety of wafer batches with different attributes. The batches of wafers that can be assigned to different machines under the same machine group are also different. [0003] At present, the vast majority of wafer manufacturing factories have adopted the real time dispatch system (Real Time Dispatch, RTD for short) to be responsible for online dispatch. The implementation of the dispatching system can use the built-in algorithm to formulate more reasonable dispatching results for the wafer batches on the line. The producti...

AI Technical Summary

Problems solved by technology

This greatly wastes the production capacity of the crane and the manufacturing plant (FAB) as well as the production capacity of the production assistants.

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