Method for manufacturing black borosilicate glass by vacuum coating

A borosilicate glass and coating equipment technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problem of lack of mature technology and achieve the effect of strong operability

Inactive Publication Date: 2015-02-11
宁波海燕新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is no particularly mature technology at home and abroad to deposit black PVD film on the surface of borosilicate glass with special purpose using vacuum coating technology.

Method used

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  • Method for manufacturing black borosilicate glass by vacuum coating

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] The invention provides a multi-chamber continuous magnetron sputtering coating equipment, the coating equipment structure is as follows figure 1 As shown, it includes a conveyor belt 1 and three vacuum chambers, and the three vacuum chambers include a first pre-pumping chamber 3 , a first coating chamber 4 and a second pre-pumping chamber 5 . The first pre-pumping chamber 3 is located in front of the first coating chamber 4, the second pre-pumping chamber 6 is located behind the first coating chamber 4, and the conveyor belt circulates in the first pre-pumping chamber, the first coating chamber, and the second pre-pumping chamber Turn to transport borosilicate glass to be coated. In addition, a glass cleaning line 2 is provided for cleaning and air-drying the borosilicate glass to be coated. The glass cleaning line 2 is integrated with the first pre-extraction chamber 3 and the conveyor belt passes through the glass cleaning line 2 at the same time. After the cleaned g...

Embodiment 2

[0048] Embodiment 2 provides a kind of multi-chamber continuous magnetron sputtering coating equipment, described coating equipment except including all structures of embodiment 1, also comprises the second coating chamber, the second coating chamber is located in the first coating chamber 4 And between the second pre-pumping chamber 5.

[0049] Correspondingly, in the method for preparing black borosilicate glass in Example 2, the borosilicate glass to be coated enters the second coating chamber for further coating treatment after the coating treatment in the first coating chamber 4, and then enters the second coating chamber. Pre-pumping chamber 5. In embodiment 2, the metal nitride thin film is deposited in the first coating chamber, and the metal nitride thin film is also deposited in the second coating chamber.

[0050] The second coating chamber is filled with argon-nitrogen mixed gas, the magnetron target applies a voltage and generates a glow discharge, and the argon-...

Embodiment 3

[0054] Embodiment 3 provides a multi-chamber continuous magnetron sputtering coating equipment, the continuous sputtering coating equipment includes all the structures of Embodiment 1, and also includes at least a second coating chamber and a third coating chamber, at least The second coating chamber and the third coating chamber are located between the first coating chamber 4 and the second pre-pumping chamber 5 .

[0055] Correspondingly, in the method for preparing black borosilicate glass in embodiment 3, the borosilicate glass to be coated enters at least the second coating chamber and the third coating chamber for further coating treatment after the coating treatment in the first coating chamber 4 , and then enter the second pre-pumping chamber 5. In Embodiment 3, each coating chamber deposits a metal nitride film, such as a TiAlN film, respectively.

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Abstract

The invention discloses a method for manufacturing black borosilicate glass by adopting the multi-cavity magnetron sputtering technology. According to the method, before being coated, the glass is cleaned up; then, the glass is conveyed to a pre-vacuum chamber of a vacuum coating device through a conveying device and enters a sputtering coating chamber matched with a large type titanium aluminum magnetic control target later on; nitrogen argon mixed gas is led into the coating chamber; voltage is exerted on the magnetic control target, and glow discharge is generated; a black TiAlN function thin film is deposited on the surface of the borosilicate glass in a reactive sputtering mode; through coated annealing treatment, internal stress of the thin film is further reduced, and the film-based interface combination force is improved. The method for manufacturing the black borosilicate glass by vacuum coating can adjust changes of blackness and transparency of the thin film through changing of components and discharging characteristics; the manufacturing method is high in maneuverability and suitable for industrial batch production and processing.

Description

technical field [0001] The invention relates to a glass preparation method and preparation equipment, in particular to a method and preparation equipment for preparing black borosilicate glass by vacuum coating. Background technique [0002] Glass-ceramic is a material with excellent light, heat, electricity, mechanical properties and rich colors. As a structural material, photoelectric functional material and decorative material, glass-ceramic is widely used in the fields of construction, new energy, electronic information and high-end home appliances. Although glass-ceramic is widely used due to its characteristics, the high overall energy consumption of glass-ceramic production has always been a problem. Therefore, the industry is trying to find a glass that can replace glass-ceramic and produce low overall energy consumption. Material. [0003] Borosilicate glass is a material with a series of advantages such as low expansion rate, high temperature resistance, high lig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/56
CPCC23C14/568C23C14/0036
Inventor 吴海忠李金龙
Owner 宁波海燕新材料有限公司
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