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Mask frame, mask plate and manufacturing method thereof

A manufacturing method and mask technology, applied in the field of mask, can solve the problem of uneven tensile force of mask strips

Active Publication Date: 2016-03-02
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Embodiments of the present invention provide a mask frame, a mask plate and a manufacturing method thereof, which solve the problem of uneven stretching force at different positions of the mask plate in the existing mask strips

Method used

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  • Mask frame, mask plate and manufacturing method thereof
  • Mask frame, mask plate and manufacturing method thereof
  • Mask frame, mask plate and manufacturing method thereof

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Embodiment Construction

[0018] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0019] An embodiment of the present invention provides a mask frame, such as image 3 As shown, it includes a frame body 11 , an elastic device 13 and two fixing parts 12 located on opposite sides of the frame body 11 , and each fixing part 12 is connected and fixed to the frame body 11 through an elastic device 13 .

[0020] It should be noted that the structure of the frame body in the embodiment of the present invention is basically the same as that of the mask frame in the prior art. The mask frame can generally be formed of metal or alloy, and the fixing part can be made of the same material as the mask frame. The fixing part is connected and fixed to the frame...

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Abstract

Disclosed are a mask frame (10), a mask plate and manufacturing method thereof. The mask frame (10) comprises a frame main body (11), the frame main body (11) being used for supporting a mask strip (20); two fixing parts (12) on two opposite sides of the frame main body (11), the two fixing parts (12) being fixedly connected with the two opposite ends of the mask strip (20) respectively; and an elastic device (13) for fixedly connecting each fixing part (12) in the two fixing parts (12) with the frame main body (11), the elastic device (13) being configured to apply a tensile force to the mask strip (20) on the fixing part (12).

Description

technical field [0001] The invention relates to the technical field of mask plates, in particular to a mask frame, a mask plate and a manufacturing method thereof. Background technique [0002] In the manufacturing process of displays, a patterned layer structure is often formed through a patterning process. The patterning process generally includes: coating a photoresist on the film, exposing, developing, and etching the photoresist with a mask, so that the film forms the same or opposite pattern as the mask. [0003] Such as figure 1 , figure 2 Shown is a mask plate for forming pixel units, including a rectangular mask frame 10 and a plurality of mask strips 20 (ie, mask strip a-mask strip i). The mask strip 20 includes a plurality of pixel patterns, the opposite ends of the mask strip 20 have welding points 21 respectively, and the mask strip 20 is welded on the mask frame 10 along the direction 101 . In order to prevent the deformation of the mask bar from sagging a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F1/64
CPCG03F1/64
Inventor 吴海东金泰逵白娟娟马群
Owner BOE TECH GRP CO LTD
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