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Apparatus for collection of cathodoluminescence signals

A technology of cathodoluminescence and light collection, which is applied in circuits, discharge tubes, electrical components, etc., and can solve problems such as being unsuitable for luminescence technology.

Inactive Publication Date: 2014-08-20
盖恩有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It is estimated that more than 80% of TEM installations worldwide are not suitable for the known TEM-cathodoluminescence technique due to the narrow pole pieces

Method used

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  • Apparatus for collection of cathodoluminescence signals
  • Apparatus for collection of cathodoluminescence signals
  • Apparatus for collection of cathodoluminescence signals

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Experimental program
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Embodiment Construction

[0020] In an exemplary embodiment, refer to figure 1 with 1a , the collecting mirrors 10, 20 connected to the endpieces of the side-entry bracket 1 collect the light at the sample position at the intersection of the fixture centerline 80 and the opening centerline 70 and transmit it to a suitable detection system outside the TEM through fiber optic cables 40, 50. The fiber optic cables have sloped surfaces 41,51 to maximize light collection.

[0021] The collection mirror operates as follows. refer to figure 2 with image 3 , the elliptical mirror has two focal points F1, F2. High collection efficiency requires that the elliptical mirror 110 encompasses a large solid angle, while the effective light coupled into the fiber 120 requires that the numerical apertures of both the fiber and the mirror match. Such designs usually take up too much height and therefore do not fit into the available space.

[0022] Through persistent efforts, the inventors have found that by tilt...

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Abstract

A side entry TEM holder incorporates a miniature tilted off axis elliptical mirror (110) to collect cathodoluminescence from the specimen (130) and couple it efficiently into a tilted fiber optic (120) integrated into the holder. The design is compatible with the cryogenic operation of the holder. TEM specimens are partially transparent to the electron beam, and so light can be emitted above and below the specimen. The same principle of off-axis mirror and tilted fiber can be utilized to collect light from above and below the specimen yet fit into the very confined space required by insertion through the goniometer and for operation between narrow gap pole pieces. With a dual system, the emission of light from above the specimen can be compared to that from below thereby enhancing the versatility of the analytical technique.

Description

[0001] Cross References to Related Applications [0002] This PCT application for patent claims the benefit of Application No. 13 / 086,952, filed December 1, 2011, entitled "APPARATUS FOR COLLECTION OF CATHODOLUMINESCENCE SIGNALS" under 35 U.S.C. § 120 , the entire disclosure of which is incorporated herein by reference. technical field [0003] The invention relates to the field of electron microscopy, in particular to collecting cathode luminescence signals. Background technique [0004] Cathodoluminescence (CL) has become a more established technique in scanning electron microscopy (SEM) due to the larger signal and easier access to the specimen with light collection optics. Cathodoluminescence is important in transmission electron microscopy (scanning transmission electron microscopy mode) because of high magnification work, high kilovolt studies, possibility to use other complementary analytical techniques such as diffraction and electron energy loss spectroscopy. [0...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/22H01J37/26
CPCH01J2237/24495H01J2237/20H01J2237/2445H01J37/26H01J2237/2808H01J37/228
Inventor 西蒙·加洛韦大卫·J·史杜威理查德·文斯利瓦伊·毕青约翰·布莱
Owner 盖恩有限公司
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