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Calibration device and calibration method for micro-flow thermal mass flow controller

A mass flow and calibration device technology, which is applied in the direction of testing/calibration devices, measuring devices, liquid/fluid solid measurement, etc., can solve the problems of large influence, limiting the lower limit of calibration of calibration devices, and difficulty in measuring small pressure changes. Effects that are difficult to measure precisely

Inactive Publication Date: 2017-01-25
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Problems solved by technology

However, for the calibration of the micro-flow calibration range and high outlet pressure conditions, the disadvantage of this method is that the calibration accumulation time is long, and the influence of virtual flow caused by factors such as temperature changes under high outlet pressure conditions is large, which limits the calibration. lower limit of calibration of the device; secondly, this method poses difficulties for the measurement of small pressure changes under high outlet pressure conditions

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  • Calibration device and calibration method for micro-flow thermal mass flow controller
  • Calibration device and calibration method for micro-flow thermal mass flow controller

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Embodiment Construction

[0019] Embodiments of the present invention will be described below with reference to the drawings. Elements and features described in one drawing or one embodiment of the present invention may be combined with elements and features shown in one or more other drawings or embodiments. It should be noted that representation and description of components and processes that are not related to the present invention and known to those of ordinary skill in the art are omitted from the drawings and descriptions for the purpose of clarity.

[0020] see figure 1 Shown is a structural diagram of an embodiment of the calibration device of the micro-flow thermal mass flow controller of the present invention.

[0021] In this embodiment, the calibration device of the micro-flow thermal mass flow controller includes a reference chamber 10 and a constant volume chamber 20 , and a first isolation valve 30 and a differential pressure gauge 40 connected between the constant volume chamber and t...

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Abstract

The invention relates to a micro-flow thermal mass flow controller calibration device and a calibration method thereof. The calibration device for the micro-flow thermal mass flow controller comprises a reference chamber, a constant volume chamber, a first isolation valve and a differential pressure gauge, wherein the first isolation valve and the differential pressure gauge are connected between the constant volume chamber and the reference chamber. The micro-flow thermal mass flow controller calibration device and the calibration method thereof can calibrate the mass flow rate of micro-flow gas and solve the problem that little pressure changes on the basis of high pressure is difficult to accurately measure.

Description

technical field [0001] The invention relates to a calibration technology for a micro-flow thermal mass flow controller, in particular to a calibration device and a calibration method for a micro-flow thermal mass flow controller. Background technique [0002] In the verification regulation JJG897-2005 "Mass Flowmeter Verification Regulations", a variety of methods for verifying mass flowmeters and mass flow controllers are introduced. flow test method. [0003] Generally, the PVTt method is suitable for the verification of thermal mass flow controllers and thermal mass flow meters. However, for the calibration of the micro-flow calibration range and high outlet pressure conditions, the disadvantage of this method is that the calibration accumulation time is long, and the influence of virtual flow caused by factors such as temperature changes under high outlet pressure conditions is large, which limits the calibration. The lower limit of calibration of the device; secondly,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F25/00
Inventor 魏万印李得天冯焱张虎忠孙雯君刘珈彤
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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