Angular displacement laser interferometer calibration method and device based on four standard optical axes

Abstract

The invention provides an angular displacement laser interferometer calibration method and an angular displacement laser interferometer calibration device based on four standard optical axes, and belongs to the technical field of laser measurement. Four measuring light beams of a laser interferometer to be calibrated pass through a middle through hole of a four-axis hollow laser interference mirror group, and are parallelly arranged in the center position of four parallel standard measuring light beams; in a quadrilateral region formed by projection points of the four standard measuring light beams at the plane, the differences of environment interference degrees of the four standard measuring light beams and the four measuring light beams of the laser interferometer to be calibrated are very small, and the air refractive index average value of the standard measuring light beams is approximate to the air refractive index value of the measuring light beams of the laser interferometer to be calibrated.

Description

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AI Technical Summary

Benefits of technology

This technology allows for precise measurements by measuring tiny changes caused by light waves passing through an object's surface or other objects that can affect its properties accurately without relying on external equipment like lenses.

Problems solved by technology

This patented technical problem addressed in this patents relates to improving the performance of an angular displacer laser Interference instrument that uses one or more light waves instead of electrical signals. Current methods involve converting analog signal data into digital form before being measured accurately due to limitations such as small errors caused during manufacture processes. However, there has been no solution provided yet despite these advances over time.

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