Method and device for measuring three fields independently and synchronously in real time by using three-dimensional digital speckle pattern interferometry
A speckle interference, three-dimensional digital technology, applied in measurement devices, optical devices, instruments, etc., can solve the problem of inability to achieve independent, synchronous and real-time measurement of three displacement subfields, and achieve precise phase measurement, accuracy improved effect
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[0013] The present invention will be further described below in conjunction with accompanying drawing.
[0014] Such as figure 1 As shown, the device of the present invention includes three digital speckle interference optical paths:
[0015] Digital speckle interference optical path I: including the first CCD imaging system 2, laser 1 and beam splitter 7, the beam splitter 7 and the first CCD imaging system 2 are coaxially arranged on a straight line, the beam splitter The back of the reference surface of 7 is provided with a piezoelectric ceramic phase shifter.
[0016] Digital speckle interference optical path II: including the second CCD imaging system 3, two plane mirrors 5, and a right-angle total inversion triangular prism 6, and the two plane mirrors 5 are symmetrically placed on both sides of the second CCD imaging system 3 in the horizontal direction; One of the two planar mirrors 5 is provided with a piezoelectric ceramic phase shifter on its back.
[0017] Digit...
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