Two degrees of freedom flexible micro operator in parallel connection

Abstract

The invention discloses a two degrees of freedom flexible micro operator in parallel connection. The two degrees of freedom flexible micro operator in parallel connection is based on piezoelectric ceramics driving. The two degrees of freedom flexible micro operator in parallel connection is characterized by comprising an executing tail end, three flexible branches, a rigid supporting frame and two piezoelectric ceramics driving devices. The rigid supporting frame is in a hollow rectangular frame structure. A ladder-shaped protrusion towards the inner portion of the rigid supporting frame is arranged at the center line place of the bilateral symmetry in the inner portion of the rigid supporting frame. The executing tail end and three flexible branches are arranged in the inner portion of the rigid supporting frame. The executing tail end is arranged on the middle and upper portion of the inner portion of the rigid supporting frame. A first flexible branch and a second flexible branch of the same structure are respectively and symmetrically connected with the left side and the right side of the executing tail end. A third flexible branch is connected below the executing tail end. The upward side of the third flexible branch is connected under the executing tail end. The downward side of the third flexible branch is connected with the ladder-shaped protrusion of the rigid supporting frame. A left and right symmetrical center line of the third flexible branch coincides with the left and right symmetrical center line of the rigid supporting frame.

Description

technical field [0001] The invention belongs to a micro-operating system in the mechanical field, in particular to a two-degree-of-freedom flexible parallel micro-manipulator. The micromanipulator is driven by piezoelectric ceramics and has two degrees of freedom, which can realize one translation and one rotation in the plane, and is mainly used in the field of micro-nano manipulation. Background technique [0002] Micro-nano technology is a dual-use strategic high-tech in the 21st century. Its appearance has a profound impact on national economic development, national defense strength, people's lives and human thinking. [0003] Micro-operating mechanism is an important branch of micro-nano technology. It has broad application prospects and important research value in the fields of micro-mechanical parts assembly, MEMS assembly and packaging, bioengineering, micro-surgery, and optical fiber coupling operations. Currently, extensive Molecular scanning microscopes, micro-ac...

AI Technical Summary

Problems solved by technology

[0004] To sum up, most of the currently known flexible micro-manipulators mostly use piezoelectric ceramic direct drive, which is limited to the displacement output that the piezoelectric body can provide, and it is difficult to achieve sufficient operating space at the execution end, while some micro-manipulators Although a certain displacement amplification mechanism is introduced to increase the range of operating space, it makes the mechanism complex and easy to accumulate errors, and causes a decrease in the overall stiffness, which is easy to cause vibration during the working process; in addition, considering the specific objects of micro-nano operation There are differences, but the basic operation sequence is the same. Flexible and precise movement ability is the most fundamental requirement for micro-manipulators. However, due to the small size and weak structure of the operating objects, some complex micro-operations must be accurately completed It is still difficult. Therefore, the design and development of micro-manipulation mechanisms with high precision, high stiffness and the ability to realize actions with more degrees of freedom and the mutual integration with other related operation technologies are the main directions of current micro-nano precision operation technology.

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