Method for testing nano thickness thin film endurance character

Abstract

The present invention relates to a test method for testing fatigue characteristics of nanometer thickness films. The main practice of the present invention is as follows: an indentation device is utilized to continuously record the load F and displacement ht data of a nanometer thickness film in a fatigue test, and the numerical value of contact rigidity in every loading / unloading cycle; when thecontact rigidity drops continuously and rapidly, corresponding cycle number is judged as the fatigue life-span number of the film. The test method is simple to operate, accurate and reliable in test result, broad in applicability and capable of realizing the research on fatigue characteristics of various ultra-thin films, and can achieve the test effect and precision which macroscopic tests cannot achieve, so as to provide reliable basis for the research on the fatigue performance of nanometer thickness films.

Description

technical field [0001] The invention belongs to the technical field of fatigue performance testing of nano-thick film. Background technique [0002] Micro-electro-mechanical systems (MEMS) are electromechanical devices that integrate micro-machines, micro-sensors, microcontrollers, and micro-actuators. Because MEMS has the characteristics of miniaturization, intelligence, integration and low price, it has broad application prospects in biomedicine, aerospace, military, industry and agriculture. [0003] Due to surface and size effects, tribological issues in MEMS cannot be ignored. For this reason, various nanoscale ultra-thin films have been designed and manufactured on the surface of the friction pair of MEMS devices to improve its friction and wear performance. For example, in order to solve the problem of friction and wear between the magnetic head and the magnetic disk in the computer hard disk, people usually prepare a 2 nanometer thick diamond-like film on the surfa...

AI Technical Summary

Problems solved by technology

However, in practical applications, due to temperature changes and vibrations, the ultra-thin film on the surface of the MEMS friction pair will inevitably withstand repeated impact or alternating compressive stress. method

However, for a long time, because the thickness of these films is on the nanometer scale, it is impossible to use traditional equipment and methods to study their fatigue properties.

[0004] Although the nanoindentation equipment can use the indenter to repeatedly indent the surface of the sample at the nanoscale to simulate the fatigue damage process of the film during service, but due to the load F-displacement h of most films t The curve changes little during the cycle, and the change rule is not obvious, it is difficult to judge the damage degree of the film through the change of the curve

Therefore, there is no universally applicable and simple and reliable test method for testing the fatigue properties of nano-thick films.

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