A
risk assessment method for
process improvement decisions applying for
semiconductor process change comprises: performing a
risk assessment evaluation to compute a polarity (plurality?) of items corresponding to their values, generating a
risk assessment evaluation value to determine if the risk
assessment evaluation value is in a risk setting value, go to next two steps; not, go to next step; performing an active inspect for the polarity (plurality?) of items corresponding to their item setting values, if not satisfied with the active inspect, repeat the above step; if not, transferring the
semiconductor process change to online process.