Apparatus for storing and moving a cassette

Abstract

A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.

Description

[0001] This application is a division of U.S. patent application Ser. No. 09 / 201,737 filed Dec. 1, 1998.[0002] 1. Field of the Invention[0003] The present invention relates generally to substrate processing, and more particularly to an apparatus for storing and moving substrate cassettes.[0004] 2. Background of the Related Art[0005] Semiconductor devices are made on substrates, such as silicon wafers or glass plates, for use in computers, monitors, and the like. These devices are made by a sequence of fabrication steps, such as thin film deposition, oxidation or nitration, etching, polishing, and thermal and lithographic processing. Although multiple fabrication steps may be performed in a single processing station, substrates must be transported between different processing stations for at least some of the fabrication steps.[0006] Substrates are stored in cassettes for transfer between processing stations and other locations. Although cassettes may be carried manually between proc...

AI Technical Summary

Problems solved by technology

Unfortunately, many processing stations can hold only a single cassette at the loading platform.

Unfortunately, running such a just-in-time cassette inventory system requires either significant operator oversight or a large number of AGVs, thereby increasing the costs of the fabrication facility.

Images