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Ejector device and method for promoting disengagement of components arranged on holding diaphragm

A diaphragm and top-off technology, applied in the manufacturing of electrical components, machines/engines, semiconductor/solid-state devices, etc., can solve problems such as increased air consumption and reduce friction

Pending Publication Date: 2020-04-24
ASM ASSEMBLY SYST GMBH & CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the vacuum is overblown, the air consumption increases

Method used

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  • Ejector device and method for promoting disengagement of components arranged on holding diaphragm
  • Ejector device and method for promoting disengagement of components arranged on holding diaphragm
  • Ejector device and method for promoting disengagement of components arranged on holding diaphragm

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Embodiment Construction

[0044] figure 1 shows the method according to the invention, which can be achieved by, for example figure 2 The illustrated ejector device 1 according to the invention is implemented. exist figure 1 Method steps a) to c) are marked in capital letters. The following will be combined with description figure 1 with figure 2 , where the details of each figure are discussed separately.

[0045] figure 2 A cross-sectional view of an ejector device 1 according to the invention is shown. In particular, the ejector head 10 is shown. A holding membrane 30 is arranged on the membrane contact surface 20 such that the membrane contact surface 20 of the ejector head 10 faces a surface 31 of the holding membrane 30 facing away from the component. Arranged on the holding membrane 30 facing away from the ejector head 10 is again a part 40 which can be detached from the holding membrane 30 by means of the ejector device 1 according to the invention. For this purpose, the ejector dev...

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PUM

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Abstract

The present invention relates to an ejector device for promoting the disengagement of a component arranged on a holding diaphragm. The device includes an ejector head having a diaphragm contact surface, wherein the diaphragm contact surface is used to abut and contact the surface, of the diaphragm, depart from a component; the ejector head further has, in the diaphragm contact surface, an ejectorport in which at least one ejector pin is movably supported; and at least one vacuum port of the vacuum section. In addition, the invention relates to a method for promoting the detachment of components arranged on the holding diaphragm by the ejector device, wherein the ejector device includes the ejector head having the diaphragm contact surface; the diaphragm contact surface is used to abut andcontact the surface, of the diaphragm, depart from a component; the ejector head further has, in the diaphragm contact surface, the ejector port in which at least one ejector pin is movably supported; and at least one vacuum port of the vacuum section; the vacuum section can generate vacuum between the diaphragm and the diaphragm contact surface through the vacuum port.

Description

technical field [0001] The invention relates to an ejector device for facilitating the disengagement of a component arranged on a retaining membrane, comprising an ejector head having a diaphragm contact surface for abutting contact with the retaining diaphragm away from The surface of the component, wherein the ejector head further has in the diaphragm contact surface: an ejector port in which at least one ejector pin is translatably supported for disengaging the part from the retaining diaphragm; and at least one of the vacuum segments Vacuum port for creating a negative pressure between the retaining diaphragm and the contact surface of the diaphragm. The invention also relates to a method for facilitating the detachment of a component arranged on a retaining membrane by means of an ejector device, the ejector device comprising an ejector head with a membrane contact surface, wherein the membrane contact surface abuts against contacting a surface of the retaining diaphragm...

Claims

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Application Information

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IPC IPC(8): H01L21/687H01L21/683
CPCH01L21/68742H01L21/6838F04F5/54F04F5/20H01L21/67132
Inventor 阿诺·斯坦恩斯蒂芬妮·周特尔
Owner ASM ASSEMBLY SYST GMBH & CO
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