Ejector device and method for promoting disengagement of components arranged on holding diaphragm
A diaphragm and top-off technology, applied in the manufacturing of electrical components, machines/engines, semiconductor/solid-state devices, etc., can solve problems such as increased air consumption and reduce friction
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[0044] figure 1 shows the method according to the invention, which can be achieved by, for example figure 2 The illustrated ejector device 1 according to the invention is implemented. exist figure 1 Method steps a) to c) are marked in capital letters. The following will be combined with description figure 1 with figure 2 , where the details of each figure are discussed separately.
[0045] figure 2 A cross-sectional view of an ejector device 1 according to the invention is shown. In particular, the ejector head 10 is shown. A holding membrane 30 is arranged on the membrane contact surface 20 such that the membrane contact surface 20 of the ejector head 10 faces a surface 31 of the holding membrane 30 facing away from the component. Arranged on the holding membrane 30 facing away from the ejector head 10 is again a part 40 which can be detached from the holding membrane 30 by means of the ejector device 1 according to the invention. For this purpose, the ejector dev...
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