A method for detecting vibration characteristics of resonators in nanoelectromechanical systems
A technology of vibration characteristics and resonators, applied in instruments, measuring devices, scientific instruments, etc., can solve problems such as lack of experimental research, and achieve the effect of intuitive structural dynamics process
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[0021] In order to facilitate those of ordinary skill in the art to understand and implement the present invention, the present invention will be described in further detail below in conjunction with the examples. It should be understood that the implementation examples described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.
[0022] A device for detecting the vibration characteristics of a resonator in a nanoelectromechanical system includes a femtosecond laser system, a vacuum chamber, an electron gun, an imaging detection system, and an optical path delay platform.
[0023] The femtosecond laser system generates femtosecond laser. The femtosecond laser is divided into two beams by a spectroscope, namely the first femtosecond laser and the second femtosecond laser. The first femtosecond laser passes through the frequency doubler and enters the electron gun. The electron gun outputs converging electron ...
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