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A method for detecting vibration characteristics of resonators in nanoelectromechanical systems

A technology of vibration characteristics and resonators, applied in instruments, measuring devices, scientific instruments, etc., can solve problems such as lack of experimental research, and achieve the effect of intuitive structural dynamics process

Active Publication Date: 2022-01-25
ARMY ENG UNIV OF PLA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these studies are still theoretical simulations, lacking experimental studies

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  • A method for detecting vibration characteristics of resonators in nanoelectromechanical systems
  • A method for detecting vibration characteristics of resonators in nanoelectromechanical systems
  • A method for detecting vibration characteristics of resonators in nanoelectromechanical systems

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Embodiment Construction

[0021] In order to facilitate those of ordinary skill in the art to understand and implement the present invention, the present invention will be described in further detail below in conjunction with the examples. It should be understood that the implementation examples described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0022] A device for detecting the vibration characteristics of a resonator in a nanoelectromechanical system includes a femtosecond laser system, a vacuum chamber, an electron gun, an imaging detection system, and an optical path delay platform.

[0023] The femtosecond laser system generates femtosecond laser. The femtosecond laser is divided into two beams by a spectroscope, namely the first femtosecond laser and the second femtosecond laser. The first femtosecond laser passes through the frequency doubler and enters the electron gun. The electron gun outputs converging electron ...

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Abstract

The invention discloses a method for detecting the vibration characteristics of a resonator of a nanoelectromechanical system. The single-crystal two-dimensional material is fixed and placed in a vacuum chamber, and the vacuum chamber is evacuated; by adjusting the pump light and converging electron probe pulse incident single crystal two-dimensional material The delay time of the two-dimensional material, the imaging detection system monitors the Kikuchi diffraction image generated after the single-crystal two-dimensional material is excited, and after data processing, the vibration frequency and quality factor of the linear longitudinal vibration and nonlinear transverse vibration of the single-crystal two-dimensional material are obtained. The invention can obtain the vibration frequency and quality factor of the linear longitudinal vibration and the nonlinear transverse vibration of the single crystal two-dimensional material.

Description

technical field [0001] The invention belongs to the technical field of vibration characteristics of two-dimensional materials, and in particular relates to a method for detecting the vibration characteristics of a resonator of a nanoelectromechanical system. Background technique [0002] Compared with microelectromechanical system resonators, nanoelectromechanical system resonators have lighter weight, lower power consumption, and higher sensitivity due to their unique effects at the nanometer scale, such as surface effects, small size effects, and macroscopic quantum tunneling effects. High, so it is used in radio frequency communication, information storage and sensors and other fields. The basic principle of the nanoelectromechanical system resonator is that the beam structure exhibits periodic vibration under external excitation. Two-dimensional materials have become excellent beam structures for nanoelectromechanical system resonators due to their ultra-light weight, l...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/2055G01N23/04G01H9/00
CPCG01N23/2055G01N23/04G01N2223/0566G01N2223/604
Inventor 刘云苏继杰成坚郑幸许罗婷赵星龙卓家靖赵京山易哲菁肖青春
Owner ARMY ENG UNIV OF PLA
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