Synchronous phase shifting interference detection device based on orthogonal double grating and detection method

Abstract

The invention discloses a synchronous phase shifting interference detection device based on orthogonal double grating and a detection method. The synchronous phase shifting interference detection device belongs to the field of optical phase shifting interference detection. The problem that the conventional synchronous phase shifting method has low use ratios of luminous energy and a CCD (charge coupled device) effective area can be solved. According to the synchronous phase shifting interference detection device, a double-grating light split technology and a polarization modulation technology are combined, and linear polarization parallel light carried out collimation light expansion is divided into an object light beam and a reference light beam of which polarization directions are mutually vertical after passing through a first polarization light splitting prism; an object to be detected and a first reflecting mirror are arranged on a reflection direction of the first polarization light splitting prism; a second reflecting mirror is arranged on a transmission direction of the first polarization light splitting prism; in use and operation processes, a light path does not need to be changed, and no optical devices need to be moved; and four interference patterns can be obtained by one-time exposure collection so as to achieve a purpose of object phase recovery. The synchronous phase shifting interference detection device is suitable for measuring an optical surface, deformation and thickness and the like.

Description

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AI Technical Summary

Benefits of technology

This patented technique uses both techniques for separating light into different colors (light) based on their wavelengths or other properties like refractive index difference between them. By combining these two technologies together, this process provides better results than just simply dividing up an entire scene onto multiple sensors that measure it separately. Additionally, by taking advantage of the strength of each component's ability to transmit signals faster over longer distances compared to traditional methods, the system becomes more efficient at measuring highly precise objects quickly without having to adjust its positioning frequently. Overall, this new approach simplifies the way we operate and reduces costs associated with current systems.

Problems solved by technology

Technological Problem addressed in this patents relates to improving the efficiency of achieving accurate measurements when performing simultaneously rotational and translational movements between different parts of space due to their relative movement speed. Existing methods have limitations that limit its effectiveness in accurately tracking fast motion phenomena like motions caused by external forces.

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