Crane device using conveyor belt in a dust-free chamber

Abstract

The embodiment of the invention provides a crane device using a conveyor belt in a dust-free chamber. An object device is symmetrically connected with a connection tool, and a crane frame is supported and fixed on a crane module of the crane frame. In order to make the positions of one side and an opposite side in parallel to the side of the crane frame rotate, a pulley driving part with more than four pulleys is arranged. A main roller contained in a driving axle transfers the rotation force to the pulleys symmetrically arranged on one side and the opposite side in the center of the crane frame. A front end of a conveying belt is fixed on a primary roller and more than four pulleys in the pulley driving part are connected with the conveying belt, thereby preventing the generation of metal dust, controlling the use of lubricant, keeping the cleanliness of an inner space, realizing the use of the dust-free chamber and a dust-free space with the same purpose of the dust-free chamber, simultaneously driving the more than four pulleys to minimize the effect of the rotation or balance degree, thus the precise position control is realized.

Description

technical field [0001] The present invention relates to the field of manufacturing industry, in particular to a crane device using a conveyor belt in a clean room. In detail, when using a conveyor belt, in order to ensure that the heavy objects being hoisted (or lowered) do not tilt, it is necessary to use multiple support points It can be hoisted (or lowered) at the same time. For the installation and maintenance of semiconductor manufacturing equipment, it is required to use conveyor belts in clean rooms that can achieve precise position control in clean rooms and clean spaces with the same purpose. Crane device. Background technique [0002] Generally, a crane device is equipped with a construction erection type transport tool in order to transport heavy loads. In the clean room of the semiconductor industry site and the clean space with the same purpose, a crane device with precise position control is required for the installation and maintenance of semiconductor equipm...

AI Technical Summary

Problems solved by technology

[0004] As the existing crane installations are made of metal, applicable boxes for steel cables and chains generate metal dust which contaminates cleanrooms and workrooms in cleanrooms serving the same purpose

Because the winding and unwinding are to be realized by cylindrical runners or sprockets, and the influence factors such as the inclination that hinder the precise handling must be minimized, so for the industrial room, special attention should be paid to the obstruction of work efficiency that will appear in the demand box The problem

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