Monopole single throw microwave switch circuit based on PIN diode and its making method

Abstract

The invention relates to the technique field of microwave circuit in micro-electronics, and discloses a single-pole single-throw (SPST) microwave switching circuit based on PIN diode, comprising fourPIN diodes, three current-limiting resistors, two blocking condensers and one voltage control end; the voltage control end is connected with anode of D1, anode of D2, cathode of D3 and cathode of D4 through R1; the cathode of D1 is connected with C1 and R2 respectively; another end of C1 is connected with the input end of circuit; another end of R2 is grounded; the cathode of D2 is connected withC2 and R3 respectively; another end of C2 is connected with the output end of circuit; another end of R3 is grounded; the anode of D3 and anode of D4 are grounded respectively. The invention also discloses a preparation method of the PIN diode-based SPST microwave switching circuit. The invention improves microwave property of switching circuit, reduces match difficulty of circuit, and simplifiesstructure of circuit and peripheral control circuit.

Description

technical field [0001] The invention relates to the technical field of microwave circuits in microelectronics, in particular to a method for manufacturing a single-pole single-throw microwave switch circuit based on a PIN diode. Background technique [0002] PIN diode is the most commonly used device in microwave control circuits. It is characterized by large controllable power, small insertion loss, and good characteristics of approximate short circuit and open circuit. It can be used in switching circuits, limiters, and phase shifters. , attenuators and modulators and other control circuits. [0003] Compared with traditional Si PIN diodes, gallium arsenide (GaAs) PIN diodes have superior high-frequency characteristics, so GaAs-based PIN diode microwave switches are widely used in microwave systems. [0004] The working principle of the PIN diode in the microwave switch is its different electrical properties under different bias voltages: define the P-type layer lead-out ...

AI Technical Summary

Problems solved by technology

[0008] 1) The additional capacitance deteriorates the microwave performance of the switch and increases the difficulty of circuit matching;

[0009] 2) The circuit structure is complex and the chip area increases

In a microwave monolithic circuit, an increase in chip area means an increase in cost;

[0010] 3) The peripheral control circuit is complex

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