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Graphite-ceramic composite heat-conducting film and its preparation method and application

A technology of ceramic composite and heat-conducting film, which is applied in the direction of chemical instruments and methods, semiconductor devices, heat exchange materials, etc., can solve the problems of rapid heat transfer and diffusion of hot spots, and achieve enhanced surface adhesion, extended service life, and improved The effect of thermal conductivity and insulation

Active Publication Date: 2021-06-01
江苏墨泰新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] One of the objectives of the present invention is to provide a graphite-ceramic composite heat conduction film to improve the technical problem that the existing graphite film cannot quickly transfer and diffuse the heat of the hot spot of the core component of the thermal control system

Method used

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preparation example Construction

[0065] According to a second aspect of the present invention, the present invention provides a method for preparing a graphite-ceramic composite heat-conducting film, comprising the steps of:

[0066] (a) the graphite film is subjected to plasma treatment;

[0067] (b) Sputtering a ceramic film on the plasma-treated graphite film to obtain a graphite-ceramic composite heat-conducting film.

[0068] The preparation method of the graphite-ceramic composite heat-conducting film provided by the present invention firstly conducts plasma treatment on the graphite film, so that the molecular structure of the graphite film becomes larger, the surface adhesion of the graphite film surface is enhanced, and then the ceramic film is firmed by sputtering Attached to the surface of the graphite film to obtain a graphite-ceramic composite heat-conducting film, which not only improves the thermal conductivity and insulation of the heat-conducting film, but also improves the high-pressure and ...

Embodiment 1

[0133] This embodiment provides a graphite-ceramic composite heat-conducting film, including a graphite film, and the surface of the graphite film is compounded with an aluminum nitride film; wherein, the graphite-ceramic composite heat-conducting film is carried out according to the following steps:

[0134] (1) Carbonization and graphitization of polyimide film to prepare graphite film

[0135] The carbonization treatment includes the following steps: in the first stage, the temperature is raised from room temperature to 310°C, and the heating time is 35 minutes; in the second stage, the temperature is raised from 310°C to 490°C, and the heating time is 40 minutes, and the temperature is raised to 490°C and then kept for 35 minutes; In the third stage, the temperature rises from 490°C to 610°C, and the heating time is 415min; in the fourth stage, the temperature rises from 610°C to 710°C, and the heating time is 235min; in the fifth stage, the temperature rises from 710°C to ...

Embodiment 2

[0142] This embodiment provides a graphite-ceramic composite heat-conducting film, including a graphite film, and the surface of the graphite film is compounded with an aluminum nitride film; wherein, the graphite-ceramic composite heat-conducting film is carried out according to the following steps:

[0143] (1) Carbonization and graphitization of polyimide film to prepare graphite film

[0144]The carbonization treatment includes the following steps: in the first stage, the temperature is raised from room temperature to 290°C, and the heating time is 45 minutes; in the second stage, the temperature is raised from 290°C to 470°C, and the heating time is 50 minutes, and the temperature is raised to 470°C and then kept for 35 minutes; In the third stage, the temperature rises from 470°C to 590°C, and the heating time is 425 minutes; in the fourth stage, the temperature rises from 590°C to 690°C, and the heating time is 245 minutes; in the fifth stage, the temperature rises from ...

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Abstract

The invention provides a graphite-ceramic composite heat-conducting film and its preparation method and application, and relates to the technical field of heat-conducting films. The method includes the following steps: firstly subjecting the graphite film to plasma treatment, and then sputtering a ceramic film on the graphite film after plasma treatment to obtain a graphite-ceramic composite heat-conducting film; To solve the technical problem of rapid heat transfer and diffusion, the graphite-ceramic composite heat conduction film provided by the present invention, through the composite of graphite film and ceramic film, not only improves the thermal conductivity and insulation of the heat conduction film, but also improves the high pressure resistance and High temperature resistance, thus effectively prolonging the service life of the core components of the thermal control system.

Description

technical field [0001] The invention relates to the technical field of heat conduction films, in particular to a graphite-ceramic composite heat conduction film and its preparation method and application. Background technique [0002] With the rapid development of the electronics industry, the integration of electronic products continues to increase, the power continues to increase, the volume continues to shrink, the heat generated by the chip also increases significantly, the heat density rises sharply, and the temperature of electronic equipment increases rapidly. There are more and more equipment failures. How to effectively solve the heat dissipation problem during the electronic period has become a key problem to be solved in the development of the entire electronic industry. Graphite film has become an ideal heat conduction and heat dissipation material for electronic products due to its ultra-high thermal conductivity and good specific heat capacity. [0003] Howeve...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09K5/14H01L23/373
CPCC09K5/14H01L23/3735
Inventor 吴国明
Owner 江苏墨泰新材料有限公司
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