Piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece
A technology of piezoelectric vibrator and piezoelectric vibrating piece, applied in piezoelectric/electrostrictive/magnetostrictive devices, manufacturing/assembly of piezoelectric/electrostrictive devices, circuits, etc., can solve the problem of low position accuracy, Decrease, undisclosed effective solutions and other issues, to achieve the effect of preventing the decline of electrical characteristics
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[0027] (Piezo Vibrator)
[0028] Hereinafter, a piezoelectric vibrator according to an embodiment of the present invention will be described with reference to the drawings.
[0029] In addition, in the following description, the first substrate is used as a wafer for a base substrate and the second substrate is described as a wafer for a lid substrate. In addition, the bonding surface of the base substrate to the lid substrate is defined as an upper surface (inner surface) U, and the surface opposite to the surface is defined as a lower surface L.
[0030] figure 1 It is a perspective view of the appearance of the piezoelectric vibrator.
[0031] figure 2 It is a diagram of the internal structure of the piezoelectric vibrator, and it is a plan view of the state where the lid substrate is removed.
[0032] image 3 yes figure 2 Sectional view at line A-A.
[0033] Figure 4 yes figure 1 An exploded perspective view of the piezoelectric vibrator shown.
[0034] In ad...
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Abstract
Description
Claims
Application Information
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