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Piezoelectric resonator element, piezoelectric device, and electronic apparatus

A piezoelectric vibrating piece and piezoelectric device technology, applied in electrical components, impedance networks, etc., can solve the problems of vibration leakage of the vibrating arm, difficulty in obtaining piezoelectric vibrating pieces of the vibrating arm, etc.

Inactive Publication Date: 2011-09-21
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, when a tapered portion (constricted portion) is formed between the vibrating arm portion and the base portion, and when the arm width is formed so as to gradually widen from the vibrating arm portion to the base portion, there is a problem that the vibrating arm portion Vibration of the vibrating arm causes vibration leakage on the base side, making it difficult to obtain a piezoelectric vibrating reed that stabilizes the vibration of the vibrating arm

Method used

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  • Piezoelectric resonator element, piezoelectric device, and electronic apparatus
  • Piezoelectric resonator element, piezoelectric device, and electronic apparatus
  • Piezoelectric resonator element, piezoelectric device, and electronic apparatus

Examples

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no. 1 Embodiment approach

[0069] Below, refer to figure 1 The first embodiment will be described.

[0070] figure 1 (A) is a schematic plan view showing the crystal vibrating piece in the first embodiment. figure 1 (B) is, figure 1 (A) Partial enlarged view. figure 1 (C) for, along figure 1 Cross-sectional view of line A-A in (A).

[0071] Such as figure 1 Shown in (A), the crystal vibrating plate 1 has: the Z axis as the optical axis of the crystal column; the X axis as the electric axis perpendicular to the Z axis; the Y axis as the mechanical axis perpendicular to the X axis, and the crystal The vibrating piece 1 is cut from a crystal Z plate along a plane relative to the X-Y plane in directions around the X axis when viewed from the intersection point (coordinate origin) of the X axis and the Y axis A plane inclined at an angle of 0° to 5°. Such as figure 1 As shown, the width direction of the base part 2 is the X axis, the length direction of the vibrating arm part 3 is the Y' axis ...

no. 2 Embodiment approach

[0103] Below, refer to image 3 A second embodiment will be described.

[0104] The crystal device in the second embodiment uses figure 1 In the crystal vibrators of the crystal vibrating piece shown in the first embodiment, the same configurations are assigned the same reference numerals and descriptions of the configurations are omitted.

[0105] image 3 (A) is a schematic plan view showing the crystal resonator in the second embodiment. image 3 (B) for, along image 3 Cross-sectional view of line C-C in (A).

[0106] The crystal resonator in the second embodiment differs from the crystal vibrating piece in the first embodiment in that it includes a case for accommodating the crystal vibrating piece.

[0107] Such as image 3 As shown, the crystal vibrator 20 includes a crystal vibrating piece 1 and a case 21 . The crystal vibrating piece 1 is accommodated in the casing 21 in an airtight state. The casing 21 includes a base 23 and a cover 22 .

[0108] The base 23 ...

no. 3 Embodiment approach

[0121] Below, refer to Figure 4 A third embodiment will be described.

[0122] The crystal device of the third embodiment uses figure 1 In the crystal oscillator of the crystal vibrating piece shown in the first embodiment, the same configurations are assigned the same reference numerals and descriptions of the configurations are omitted.

[0123] The crystal oscillator in the third embodiment differs from the crystal resonator in the second embodiment in that it has a drive circuit electrically connected to the crystal resonator to drive the crystal resonator.

[0124] Such as Figure 4 As shown, the crystal oscillator 30 includes a crystal vibrating piece 1 , a case 21 and a drive circuit 31 . The crystal vibrating piece 1 and the driving circuit 31 are housed in the casing 21 in an airtight state. The casing 21 includes a base 23 and a cover 22 .

[0125] The base 23 includes a laminated substrate 34 . On the base substrate 15 , laminated substrates 34 , 16 , and 17...

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Abstract

A piezoelectric resonator element and a piezoelectric device, which prevent the vibration of the resonating arm section from leaking to the side of the base portion and stabilize the vibration of the resonating arm section, and an electronic apparatus using these devices are obtained. The quartz crystal resonator element as the piezoelectric resonator element is provided with a base portion formed of a piezoelectric material, a plurality of resonating arm sections each extending from the base portion via an arm base section, and an elongated groove section formed along a longitudinal direction of the resonating arm section, and the arm base section has an arm width, which is larger than an arm width of the resonating arm section and smaller than a distance between imaginary centerlines of the respective resonating arm sections in a width direction of the resonating arm section.

Description

technical field [0001] The present invention relates to a piezoelectric vibrating piece, a piezoelectric device, and electronic equipment using these components. Background technique [0002] Conventionally, the vibrating arm portion of the piezoelectric vibrating reed is formed so as to extend from the base portion. In addition, a tapered portion (narrow portion) is formed in order to prevent stress concentration at the joint between the vibrating arm and the base and to stabilize the vibration of the vibrating arm (for example, refer to Patent Documents 1 and 2). Furthermore, there is disclosed a piezoelectric vibrating reed in which the arm width of the vibrating arm portion is formed such that the arm width gradually increases from the vibrating arm portion to the base portion (for example, refer to Patent Document 3). [0003] prior art literature [0004] Patent Document 1: Japanese Unexamined Patent Publication No. 2005-5896 (pages 5 to 7, Figure 1~5 ) [0005] Pa...

Claims

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Application Information

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IPC IPC(8): H03H9/21
CPCH03H9/215H03H9/1021
Inventor 棚谷英雄
Owner SEIKO EPSON CORP
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