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Method for lowering concentration of harmful gas in object

A harmful gas and gas technology, applied in the direction of pollution prevention methods, cleaning methods and appliances, chemical instruments and methods, etc., can solve the problems of excessive nitrogen, long time, waste of cost, etc., to improve service life and storage period, The effect of reducing the concentration of harmful gases and shortening the storage time

Inactive Publication Date: 2011-07-20
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, because the apertures of these holes 105 are very small, it often takes a long time to discharge the harmful gas, which not only fails to quickly and effectively reduce the concentration of harmful gas inside the photomask, but also leads to a relatively high consumption during the storage process. Too much nitrogen is a waste of cost, which is not conducive to the preservation and subsequent use of the photomask, and ultimately leads to a shorter life cycle of the photomask in later use

Method used

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  • Method for lowering concentration of harmful gas in object
  • Method for lowering concentration of harmful gas in object
  • Method for lowering concentration of harmful gas in object

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Embodiment Construction

[0024] In the following description, numerous specific details are given in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without one or more of these details. In other examples, some technical features known in the art are not described in order to avoid confusion with the present invention.

[0025] The invention provides a method for reducing the concentration of harmful gas in the inner space of the article. The method mainly changes the pressure value of the inert gas fed into the inner space of the storage cabinet for storing the article, so that the harmful gas inside the photomask can be quickly and effectively discharge. The method can discharge the inert gas and the harmful gas inside the object (for example, a photomask) together, thereby achieving the purpose of reducing the concentration of harmful gas inside the photomask, and prolonging...

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Abstract

The invention discloses a method for lowering the concentration of harmful gas in an object. The object is placed in a storage cabinet, wherein, the surface of the object is equipped with holes for diffusing the harmful gas in the object, and the storage cabinet is provided with one or more air inlets and air outlets. The method comprises the following steps: sealing the air outlets of the storage cabinet for accommodating the object; filling a first gas into the space of the sealed storage cabinet so that the air pressure in the space of the storage cabinet is increased from a first pressure value to a second pressure value, wherein, the second pressure value P2 is greater than the first pressure value; and finally exhausting the gas in the space of the storage cabinet. By utilizing the method, the concentration of the harmful gas in the object stored in the storage cabinet can be effectively lowered, and the service life and storage period of the object can be effectively prolonged.

Description

technical field [0001] The invention relates to a method for reducing harmful gas, in particular to a method for reducing the concentration of harmful gas in the inner space of an article. Background technique [0002] At present, in the electronics, medical and chemical industries, special storage cabinets are usually used to store articles or equipment with harmful gases, and inert gas is introduced into the storage cabinets to reduce the harmful gases inside the articles or equipment, so that these articles or equipment be better used and prolong the service life. The existing method to reduce the concentration of harmful gases is to directly inject inert gas into the storage cabinet containing the items, so that the protected items are in an inert gas environment, and the part taken away by the circulation of the inert gas diffuses in the storage cabinet. to reduce or reduce the concentration of harmful gases in the storage cabinet, so as to protect the item and prolong...

Claims

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Application Information

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IPC IPC(8): B08B17/00
Inventor 邓若岩金普楠
Owner SEMICON MFG INT (SHANGHAI) CORP
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