Lamp lighting device and filament lamp

Abstract

For providing a lamp lighting device and a filament lamp wherein a wire breakage of the filament lamp can be detected without an excessive consumption of power while the device as a whole is not enlarged, a filament lamp is provided comprising a light emission tube in the interior of which at least one filament is arranged, internal leads connected to both ends of said filament, metal foils for power supply provided in said at least one sealing portion of the light emission tube and connected to said internal leads, and external leads connected to said metal foils for power supply; wherein a metal foil for detection is provided in said sealing portion and is connected to one of a said internal lead and a said metal foil for power supply, and an external detection lead is connected with the metal foil for detection, and is connected with an external lead by the external detection lead.

Description

technical field [0001] The present invention relates to a lamp lighting device and a filament lamp for semiconductor wafer heating and the like. Background technique [0002] The light irradiation type heating device in the semiconductor manufacturing process is used in a wide range of film formation, diffusion, annealing, etc., and any treatment can rapidly heat the semiconductor wafer such as the plate-shaped object to be processed, within a few seconds to tens of seconds Raise the temperature to above 1000°C. In recent years, it has been required to increase the temperature at a higher speed, and the power input to the lamp has been increased. This is called spike annealing, and the temperature is raised at a high speed exceeding 200°C / sec, and then cooled immediately when the target temperature is reached. A very thin diffusion layer (shallow junction: shallow junction) can be formed by this spike annealing, and the performance of a semiconductor element can be improve...

AI Technical Summary

Problems solved by technology

[0009] However, in order to detect disconnection using the current transformer, it is necessary to install one current transformer for one filament lamp. Therefore, in a light irradiation type heating device in which a plurality of filament lamps are arranged in parallel, there is a disadvantage that the entire device is enlarged.

In addition, since the inverter is attached to the filament lamp one by one, there is also a disadvantage in that the production cost increases.

[0010] In addition, even if a current detector is connected in series to the power supply line connecting the power supply and the filament lamp, and an impedance is installed in the power supply line for current detection, power consumption will be lost.

The voltage is generated by the current detector, and the energy is consumed by the impedance of the current detector, which is the reason for the excess power consumption.

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