Decompression drying device
A decompression drying device and a ring-shaped technology, which is applied to the device for coating liquid on the surface, the pretreatment surface, the coating, etc., can solve the problem of uneven drying of the coating film, and achieve the effect of suppressing the uneven drying.
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[0040] Embodiments of the present invention will be described with reference to the drawings.
[0041] Figure 1 to Figure 5 is a diagram schematically showing a reduced-pressure drying device according to an embodiment of the present invention, wherein, figure 1 It is a perspective view showing the state that the cavity cover 10 and the cavity main body 20 of the decompression drying device are separated; figure 2 is a top view of the cavity main body; image 3 is a diagram showing the cavity main body base 21; Figure 4 It is a partial cross-sectional view showing a state in which the substrate 1 is placed on the chamber main body 20; Figure 5 It is a diagram showing a state in which a substrate is accommodated in a reduced-pressure drying apparatus.
[0042] Such as Figure 1 to Figure 5 As shown, the reduced-pressure drying device is a device for drying a coating film such as a resist solution formed on a substrate 1 , and includes a chamber main body 20 (substrate ...
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