Three-degree of freedom flexible precision positioning workbench

Abstract

The invention discloses a three-degree of freedom flexible precision positioning workbench. In a structure of the workbench, six piezoelectric ceramic drivers are adopted, the tail of each driver is connected with a substrate through bolts, and the top end is in threaded connection with a ball joint to realize hertz contact; a flexible structure of the positioning workbench mainly comprises the substrate, six flexible branched chains with identical structures and a movable platform supported by the flexible branched chains; and three position sensors are used for measuring the actual output of the movable platform and are respectively fixed between a rigid support and the movable platform. The precision positioning workbench has the characteristics of high resolution ratio and high speed of dynamic response, and can be used as an assisted positioning platform of a nano-imprint lithography positioning system to realize microscale feeding and precision positioning.

Description

technical field [0001] The invention belongs to a micro-operating system, in particular to a two-translation-one-rotation flexible precision positioning worktable which can be applied to an imprint lithography system. Background technique [0002] Nanodevices include nanoelectronic devices and nanophotoelectric devices, which can be widely used in electronics, optics, micromechanical devices, new computers, etc. , intelligent, high integration and other mainstream development directions. Due to the potential huge market and national defense value of nanodevices, the methods, approaches and processes of its design and manufacture have become the research and investment hotspots of many scientists, governments and large enterprises. At present, the design and manufacture of nano-devices are in a period of rapid development. There are various methods, and patterning technology is one of them. [0003] Nanoimprint lithography is a patterning technique developed in the process ...

AI Technical Summary

Problems solved by technology

Among these existing technologies, although the self-adaptive adjustment precision positioning system is simple in structure, compact in structure and low in cost, its positioning accuracy, especially the adjustment accuracy of parallelism is low, which limits the improvement of processing accuracy and quality

Although the parallelism between the imprint template and the substrate can be improved to a certain extent through active leveling and manual adjustment mechanisms, it cannot compensate for the parallelism error between the template and the substrate due to uneven imprint force during the imprinting process

The airbag cylinder type imprinting system overcomes the disadvantages that the silicone is easily stretched and deformed during the imprinting process, the imprinting force is unevenly distributed, and the template is easy to break. However, the design and use of the vacuum chamber is expensive and the imprinting time is too long.

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